Growth of vertically aligned carbon nanotubes on a silicon substrate by a spray pyrolysis method
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摘要: 以向日葵油的甲基酯为碳源,二茂铁为催化剂前驱体,Ar为载气,通过喷雾热解法在硅衬底上合成定向碳纳米管阵列。结果表明,在硅衬底上原位形成Fe催化剂纳米颗粒。由拉曼光谱、透射电镜图和X-射线衍射谱图显示所制定向碳纳米管阵列具有较好的石墨化程度,其直径为10~30nm, 管壁约为10nm。所制定向碳纳米管阵列中残留的催化剂含量可以忽略。Abstract: Vertically aligned carbon nanotubes on a silicon substrate were synthesized by a spray pyrolysis method using the methyl ester of Helianthus annuus oil as a carbon source, ferrocene as a catalyst precursor and argon as a carrier gas. Results show that Fe catalyst nanoparticles are formed from ferrocene in-situ on the silicon substrate. As-grown vertically aligned carbon nanotubes are well graphitized as shown by Raman spectra, transmission electron microscopy images and X-ray diffraction patterns. The diameter of the carbon nanotubes is around 10-30 nm and their wall thickness is around 10 nm. The content of catalyst in the products is negligible.
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Key words:
- Spray pyrolysis /
- Aligned carbon nanotubes /
- Ferrocence /
- Silicon substrate /
- CVD
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