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摘要: 采用电子辅助化学气相沉积法(EACVD)制备了氮掺杂金刚石膜，用SEM、Raman光谱、XPS、EPR等测试手段研究了金刚石薄膜的品质和膜中的氮杂质状态。结果表明，随着氮气流量的增加，金刚石膜的形貌从完整的晶面逐渐变为与（100）面共存的“菜花状”，且非晶碳的含量增加，品质下降。金刚石膜中氮以Ns0、[N—V]0和[N—V]－1的形式存在，在较低氮气流量下[N—V]0和[N—V]－1的含量较多，Ns0氮杂质的质量分数在1.50×10－5～4.83×10－4之间变化。Abstract: Nitrogendoped diamond films were synthesized by electron assisted chemical vapor deposition. The quality and chemical state of nitrogen in the diamond films were characterized by SEM, Raman, XPS, and EPR. Results showed that the morphologies of the diamond films changed from integrated facets to the “cauliflower-like” diamond (100) faces, the amorphous carbon content increased and its quality dropped with increasing nitrogen flow rate. The chemical state of nitrogen in the diamond films was of the form Ns0, [N-V]0 and [N-V]-1. The amounts of [N-V]0 and [N-V]-1 were higher when the nitrogen flow rate was lower, and the mass fraction of Ns0 varied from 1.50×10-5 to 4.83×10-4.
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