化学气相沉积低温热解炭的微观组织结构与沉积模型

基金项目: 国家自然科学基金(90716024),国家“111"引智计划(B08040)

Deposition model and microstructure of low temperature pyrocarbon produced by chemical vapor deposition

C/C Composites Technology Research Center, State Key Laboratory of Solidification Processing,Northwestern Polytechnical University, Xi’an 710072, China

Funds: National Natural Science Foundation of China (90716024), “111” Project (B08040)

摘要: 利用扫描电子显微镜(SEM), 透射电子显微镜(TEM)结合选取电子衍射(SAED)研究了化学气相沉积低温热解炭的微观组织结构。结果表明：低温热解炭是由直径小于2 μm的球形颗粒状炭组成，该球形颗粒状炭的核心是炭黑颗粒，外层为中织构热解炭。其沉积过程主要经历了：微小炭黑颗粒的萌生，炭黑颗粒外层的生长，炭颗粒表面热解炭的沉积和炭颗粒的聚集长大四个过程。
- 热解炭 /
- 化学气相沉积 /
- 微观结构 /
- 沉积模型
Abstract: Low temperature pyrocarbon (PyC) was prepared by chemical vapor deposition. The microstructure of the deposited PyC was investigated by scanning and transmission electron microscopy with selected area electron diffraction. Results show that the PyC is composed of spherical carbon particles less than 2 μm in diameter. The center of the particles is carbon black, whereas the outer layer is medium-textured PyC. The deposition of the PyC includes four steps: formation of carbon black, growth of the outer layer on the carbon black, deposition of PyC on the surface of carbon particles and aggregation of carbon particles.
- Pyrocarbon /
- Chemical vapor deposition /
- Microstructure /
- Deposition model

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