Diamond-like carbon film deposited on stainless steel and a hard alloy substrate by the anode ion beam technique
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摘要: 利用阳极离子束技术在SKD11型不锈钢和YG6硬质合金上沉积类金刚石（DLC）薄膜，采用扫描电子显微镜、原子力显微镜、Raman光谱分析薄膜微观结构和表面形貌；采用WS-2005型附着力划痕仪和洛氏压力机测试膜基结合强度；采用球磨仪测试膜层耐磨性能。结果表明：利用该技术所制DLC膜是一种非晶结构、表面平整的薄膜，粗糙度Ra值仅为5.21nm。DLC/Cr/SKD11膜系Raman光谱ID/IG值（0.69）高于DLC/Cr/YG6膜系（1.54），说明SKD11高于YG6所制膜层的sp3C键含量；DLC/Cr/SKD11膜系结合强度（17.8 N）低于DLC/Cr/YG6膜系（39.2 N），且DLC/Cr/YG6膜系的洛氏压痕周围仅有放射状微细裂纹，而DLC/Cr/SKD11膜系的压痕周围存在膜层脱落现象；沉积在SKD11与YG6基体上DLC膜的单位磨损率分别为1.40E-4和8.81E-5，说明YG6基体上DLC膜层的耐磨性要优于SKD11基体上的DLC膜层。由此看出，不同基体上制备的DLC膜层微观结构不同，导致结合性能及耐磨性能不同。Abstract: Diamond like carbon films were deposited by the anode ion beam technique on stainless steel (SKD11) and a hard alloy of W and Co (YG6) substrate. The microstructure and morphology of the films were investigated by scanning electron microscopy, atomic force microscopy and Raman spectroscopy. Their mechanical and tribological properties were studied by a WS-2005 scratch tester, a Rockwell hardness tester and a ball-cratering tester. Results show that the films are smooth and dense. The surface roughness (Ra) of the films is around 5.2 nm. The content of sp3 bonds of the film on SKD11 (ID/IG=0.69) is higher than that on YG6 (ID/IG=1.54). The bond strength of the film on SKD11 (17.8 N) is lower than that on YG6 (39.2 N). There are only minute radial cracks on the film on YG6 while the film on SKD11 is peeled off after Rockwell hardness testing. The wear rate of the film on SKD11 (1.40E-4) is higher than that on YG6 (8.81E-5) as revealed by the ball-cratering tests.
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