碳纳米管互连技术新进展

杨立军; 崔健磊; 王扬; 梅雪松; 王文君; 谢晖

碳纳米管互连技术新进展

杨立军^1,2,
崔健磊^1,2,3,
王扬^1,,
梅雪松³,
王文君³,
谢晖¹

1.
哈尔滨工业大学机器人技术与系统国家重点实验室, 黑龙江哈尔滨 150001;
2.
哈尔滨工业大学先进焊接与连接国家重点实验室, 黑龙江哈尔滨 150001;
3.
西安交通大学机械制造系统工程国家重点实验室, 陕西西安 710049

基金项目: 国家自然科学基金(51505371,51275122);中国博士后科学基金(2014M562397,2015T81018);中央高校基本科研业务费专项资金(xjj2015009);陕西省博士后科研项目;机器人技术与系统国家重点实验室开放研究项目(SKLRS-2016-KF-13).

详细信息

作者简介:
杨立军,副教授.E-mail:yljtj@hit.edu.cn

通讯作者:
王扬,教授.E-mail:wyyh@hit.edu.cn,cjlxjtu@xjtu.edu.cn

中图分类号: TB383
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- 被引次数: 0
出版历程
- 收稿日期: 2015-11-30
- 录用日期: 2016-02-02
- 修回日期: 2016-01-10
- 刊出日期: 2016-01-28

Research progress on the interconnection of carbon nanotubes

1.
State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China;
2.
State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China;
3.
State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049, China

Funds: National Natural Science Foundation of China(51505371,51275122);China Postdoctoral Science Foundation(2014M562397,2015T81018);Fundamental Research Funds for the Central Universities(xjj2015009);Shaanxi Postdoctoral Scientific Research Project Funds;State Key Laboratory of Robotics and System(HIT)(SKLRS-2016-KF-13).

摘要

摘要: 随着功能器件互连导线的规模逐渐扩大,导线的尺寸不断减小,量子效应明显加强,未来将导致目前采用铜互连技术的微纳功能器件无法遵循传统半导体物理的原理工作。碳纳米管凭借其独特的一维纳米结构而具有优越的电学、热学及机械等性能,有望取代铜连线而成为下一代芯片的互连导线材料,而碳纳米管的互连技术则是结构制造、功能器件制备或其组装不可或缺的重要环节,现已成为国际新材料领域的研究前沿和热点,本文详细概述碳纳米管作为互连导线的优越性能、互连形式、互连技术的最新研究进展以及应用前景。
- 碳纳米管 /
- 性能 /
- 互连 /
- 应用前景
Abstract: The use of carbon nanotubes(CNTs) as conducting wires instead of copper wires for integrated circuits and very large scale integration has become more and more important as their sizes are being scaled down and quantum effects become evident owing to their one-dimensional structure, excellent electrical, thermal and mechanical properties.Interconnect technologies for CNTs have become an important research activity in recent years and the latest research progress is summarized.Methods include localized nanoscale chemical vapor deposition, electron, ion and laser beam irradiations, atom force microscopy using field-induced evaporation and anodic oxidation, and dip-pen nanolithography in the AFM using dynamic exchange between tapping and lifting.
- Carbon nanotubes /
- Performances /
- Interconnect /
- Application

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