纳米球形炭的无催化化学气相沉积制备及其机理研究

张铀; 杨威; 罗瑞盈; 商海东

doi:10.1016/S1872-5805(16)60025-2

纳米球形炭的无催化化学气相沉积制备及其机理研究

doi: 10.1016/S1872-5805(16)60025-2

北京航空航天大学物理科学与核能工程学院, 北京 100191

基金项目: 国防基础科研计划重点项目（A2120132005）.

详细信息

通讯作者:
罗瑞盈.E-mail:ryluo@buaa.edu.cn

中图分类号: TQ127.1⁺1
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- 文章访问数: 460
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- PDF下载量: 578
- 被引次数: 0
出版历程
- 收稿日期: 2016-07-28
- 录用日期: 2016-10-28
- 修回日期: 2016-10-03
- 刊出日期: 2016-10-28

Preparation of carbon nanospheres by non-catalytic chemical vapor deposition and their formation mechanism

School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China

Funds: National Defense Basic Scientific Research Program of China(A2120132005).

摘要

摘要: 以天然气为碳源，氢气为载气，通过无催化化学气相沉积的方法，合成不同粒径的球形炭。研究了沉积温度、压力和气体比例对化学气相沉积球形炭的影响。用X射线衍射、扫描电子显微镜和透射电子显微镜对实验结果进行表征。研究结果表明制备纳米球形炭（50~100 nm）的优化工艺为沉积温度1 150℃、沉积压力5 kPa和天然气/氢气（气体流量比）1∶4。本研究对球形炭的气相沉积机理进行了详细的研究。沉积温度对球形炭的尺寸和微结构影响较小，沉积压力对炭核的碰撞几率影响较大。另外，氢在炭形核过程中起来很重要的作用，氢的存在有效的较少了炭核的碰撞几率。
- 球形炭 /
- 化学气相沉积 /
- 天然气 /
- 氢气 /
- 形核机理
Abstract: Carbon spheres with different sizes were prepared by non-catalytic chemical vapor deposition fromgas mixtures of CH₄ and H₂. The influence of the deposition temperature, pressure, and gas ratio on the formation and growth mechanism of the spheres was investigated. The carbon spheres obtained were characterized by XRD, SEM and TEM. Results indicated that carbon nanospheres (50-100 nm) could be obtained at 1 150℃ and 5 kPa from a gas mixture with a CH₄/H₂ volume ratio of 0.25. The deposition temperature had no obvious effect on the sphere size and structure. The sphere size increased with the deposition pressure and the gas ratio. A model was proposed to elucidate their formation and growth.
- Carbon spheres /
- CVD /
- Natural gas /
- Hydrogen /
- Nucleation mechanism

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