载气对化学气相沉积中气体流场、反应物与热解炭沉积率影响的仿真研究

殷腾; 蒋炳炎; 苏哲安; 樊哲琼; 黄启忠

doi:10.1016/S1872-5805(18)60345-2

载气对化学气相沉积中气体流场、反应物与热解炭沉积率影响的仿真研究

doi: 10.1016/S1872-5805(18)60345-2

1.
中南大学, 高性能复杂制造与装备国家重点实验室, 湖南长沙 400083;
2.
中南大学, 粉末冶金国家重点实验室, 湖南长沙 400083

基金项目: 中南大学机电工程学院研究生创新项目（2014bcsjj04）.

详细信息

作者简介:
殷腾,博士.E-mail:461782178@qq.com

通讯作者:
蒋炳炎,博士,教授.E-mail:jby@csu.edu.cn

中图分类号: TQ127.1⁺1
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- 文章访问数: 535
- HTML全文浏览量: 113
- PDF下载量: 174
- 被引次数: 0
出版历程
- 收稿日期: 2018-06-10
- 录用日期: 2018-08-30
- 修回日期: 2018-08-03
- 刊出日期: 2018-08-28

Numerical simulation of carrier gas effects on flow field, species concentration and deposition rate in the chemical vapor deposition of carbon

1.
State Key Laboratory of High-Performance Complex Manufacturing, Central South University, Changsha 400083, China;
2.
State Key Laboratory of Powder Metallurgy, Central South University, Changsha 400083, China

Funds: Student Creative Program of Mechanical Engineering Department of Central South University (2014bcsjj04).

摘要

摘要: 为了研究载气对化学气相沉积过程的影响，采用二维仿真模型，模拟立式反应炉中化学气相沉积过程。并建立了全组分扩散模型描述化学气相沉积过程中气体分子间的扩散过程。研究了氢气，氮气和氩气对气体流场，反应物浓度场以及热解炭沉积率的影响。结果表明，氢气有利于提高气体流场的稳定性；氢气有利于反应物的扩散，以氢气作为载气时，沉积壁面CH₄，C₂H₂，C₂H₄和C₆H₆的浓度均匀性较好。采用氩气和氮气作为载气时，沉积率均高于氢气做载气的情况，但热解炭的沉积均匀性低于氢气做载气时的情况。仿真结果与实验吻合较好。
- 化学气相沉积 /
- 扩散 /
- 仿真 /
- 载气
Abstract: A 2D numerical model was established for simulating the chemical vapor deposition (CVD) of carbon in a vertical reactor. A full multi-component diffusion model was proposed to describe the diffusion of the gas species. The effects of Ar, N₂ or H₂ carrier gases on the flow field, species concentration and deposition rate of pyrocarbon were investigated using C₃H₆ as the carbon source. Results show that H₂ improves the stability of the gas flow. The concentration distributions of CH₄, C₂H₂, C₂H₄ and C₆H₆ are uniform in H₂. The pyrocarbon deposition rate is lowered, but the uniformity of deposition is improved when H₂ is used as the carrier gas compared with N₂ or Ar. The simulation results agree well with the experimental ones.
- Chemical vapor deposition /
- Diffusion /
- Simulation /
- Carrier gas

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参考文献(17)

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