过渡金属Fe、Ni和Co对金刚石膜表面腐蚀作用的研究

过渡金属Fe、Ni和Co对金刚石膜表面腐蚀作用的研究

  • 摘要: 采用电子增强CVD和直流热阴极PCVD方法制备出金刚石膜,在真空条件下用高温热灯丝加热方法研究了过渡金属Fe、Ni和Co对金刚石膜表面的腐蚀作用,并对腐蚀后的金刚石膜表面和金属表面进行了XRD和Raman光谱测量。结果表明:过渡金属Fe、Ni和Co对金刚石表面具有明显的腐蚀作用,其中Fe的腐蚀作用最好。经过过渡金属腐蚀后金刚石表面和金属表面形成了非金刚石碳相而没有发现过渡金属碳化物。

     

    Abstract: Abstract: Diamond films were synthesized by electron enhanced CVD and hot cathode DC-PCVD, and the corrosive action of transition-metals Fe, Ni and Co on the surface was investigated using hot-filament heating under vacuum. The metals and the corroded surface of the diamond films were characterized by X-ray diffraction (XRD) and Raman spectroscopy. The corrosive effect of these transition-metals on the diamond films can be seen, with Fe having the largest effect. A non-diamond carbon phase was formed on the corroded surface of the diamond films and on the transition-metals, but transition-metal carbides were not found.

     

/

返回文章
返回