Abstract: Vertically aligned carbon nanotube (VACNT) arrays with good mechanical properties and high thermal conductivity can be used as effective thermal interface materials in thermal management. In order to take advantage of the high thermal conductivity along the axis of nanotubes, the quality and height of the arrays need to be optimized. However, the immense synthesis parameter space for VACNT arrays and the interdependence of structural features make it challenging to improve both their height and quality. We have developed a literature mining approach combined with machine learning and high-throughput design to efficiently optimize the height and quality of the arrays. To reveal the underlying relationship between VACNT structures and their key growth parameters, we used random forest regression (RFR) and SHapley Additive exPlanation (SHAP) methods to model a set of published sample data (864 samples). High-throughput experiments were designed to change 4 key parameters: growth temperature, growth time, catalyst composition, and concentration of the carbon source. It was found that a screened Fe/Gd/Al₂O₃ catalyst was able to grow VACNT arrays with millimeter-scale height and improved quality. Our results demonstrate that this approach can effectively deal with multi-parameter processes such as nanotube growth and improve control over their structures.